SIEW AUN TAN; MOHD ZULKIFLY ABDULLAH; KOK HWA YU. Heat Transfer Analysis of Diffusion Furnace for Wafer Annealing Process. Journal of Advanced Research in Fluid Mechanics and Thermal Sciences, [S. l.], v. 75, n. 3, p. 43–53, 2024. Disponível em: https://semarakilmu.com.my/journals/index.php/fluid_mechanics_thermal_sciences/article/view/6928. Acesso em: 18 may. 2024.