[1]
Siew Aun Tan, Mohd Zulkifly Abdullah, and Kok Hwa Yu, “Heat Transfer Analysis of Diffusion Furnace for Wafer Annealing Process”,
J. Adv. Res. Fluid Mech. Therm. Sc.
, vol. 75, no. 3, pp. 43–53, Mar. 2024.